We have studied the influence of difference growth conditions on the two-dimensional to three-dimensional growth mode transition for a specific class of InGaAs/GaAs quantum dots ~QDs! optimized for applications to optical devices operating around 1.3 mm ~In content x'0.5). The dots are grown by low-pressure metalorganic chemical vapor deposition on GaAs substrates. We demonstrate that the critical layer thickness corresponding to optimized single-QD layer structures ~i.e., with reduced wetting layer thickness and high uniformity! can be controlled by kinetic effects. The optimized growth conditions allow us to grow six-layers stacked QD structures as active material for the fabrication of a light emitting devices operating around 1.3 mm at room temperature.
Passaseo, A., Rinaldi, R., Longo, M., Antonaci, S., Convertino, A.l., Cingolani, R., et al. (2001). Structural study of InGaAs/GaAs quantum dots grown by metalorganic chemical vapor deposition for optoelectronic applications at 1.3 μm. JOURNAL OF APPLIED PHYSICS, 89(8), 4341-4348 [10.1063/1.1351861].
Structural study of InGaAs/GaAs quantum dots grown by metalorganic chemical vapor deposition for optoelectronic applications at 1.3 μm
Longo, M.;
2001-01-01
Abstract
We have studied the influence of difference growth conditions on the two-dimensional to three-dimensional growth mode transition for a specific class of InGaAs/GaAs quantum dots ~QDs! optimized for applications to optical devices operating around 1.3 mm ~In content x'0.5). The dots are grown by low-pressure metalorganic chemical vapor deposition on GaAs substrates. We demonstrate that the critical layer thickness corresponding to optimized single-QD layer structures ~i.e., with reduced wetting layer thickness and high uniformity! can be controlled by kinetic effects. The optimized growth conditions allow us to grow six-layers stacked QD structures as active material for the fabrication of a light emitting devices operating around 1.3 mm at room temperature.File | Dimensione | Formato | |
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Structural study of InGaAs-GaAs quantum dots grown by metalorganic chemical vapor deposition for optoelectronic applications at 1.3 μm.pdf
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