The Italian National Project “FIRB-EUVL” is introduced and discussed. This project includes the realization of a micro-exposure-tool and the up-grading of the National knowledge on EUV-lithography in all its aspects, from plasma sources (both high power sources and auxiliary sources for tests), debris mitigation, multilayer mirrors, and masks. The micro-exposure-tool, which is under development, will be operated at a wavelength slightly different from the international standard of 13.5 nm in order to allow the use of an innovative debris mitigation system. A novel application of EUVL to photonics is also reported.

Reale, A., Baldacchini, G., Baldesi, A., Bellecci, C., Bollanti, S., Bonfigli, F., et al. (2006). The Italian FIRB project on EUV lithography. In International symposium on extreme ultraviolet lithography: 15-18 October 2006, Barcelona, Spain [on-line].

The Italian FIRB project on EUV lithography

REALE, ANDREA;BELLECCI, CARLO;GAUDIO, PASQUALINO;MARTELLUCCI, SERGIO;RICHETTA, MARIA;TOMASSETTI, GIUSEPPE;
2006-01-01

Abstract

The Italian National Project “FIRB-EUVL” is introduced and discussed. This project includes the realization of a micro-exposure-tool and the up-grading of the National knowledge on EUV-lithography in all its aspects, from plasma sources (both high power sources and auxiliary sources for tests), debris mitigation, multilayer mirrors, and masks. The micro-exposure-tool, which is under development, will be operated at a wavelength slightly different from the international standard of 13.5 nm in order to allow the use of an innovative debris mitigation system. A novel application of EUVL to photonics is also reported.
EUVL symposium
Barcelona (Spain)
2006
5.
Rilevanza internazionale
2006
Settore FIS/01 - FISICA SPERIMENTALE
English
http://www.sematech.org
Intervento a convegno
Reale, A., Baldacchini, G., Baldesi, A., Bellecci, C., Bollanti, S., Bonfigli, F., et al. (2006). The Italian FIRB project on EUV lithography. In International symposium on extreme ultraviolet lithography: 15-18 October 2006, Barcelona, Spain [on-line].
Reale, A; Baldacchini, G; Baldesi, A; Bellecci, C; Bollanti, S; Bonfigli, F; Clementi, G; Conti, A; Dikonimos, T; Di Lazzaro, P; Flora, F; Francucci, ...espandi
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/2108/33683
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