In this paper, the basic principles of Near-Field Microscopy will be reviewed with focus on the micro- and nano-scale resolution configurations for material science measurements. Results on doping profile, dielectric and magnetic properties will be presented, with details on the calibration protocols needed for quantitative estimation of the dielectric constant and of the permeability.
R., M., Lucibello, A., G., C., E., P., G., S., Christopher, H.j., et al. (2017). Near-field microwave techniques for micro – and nano - scale characterization in materials science. In Proceedings of International Semiconductor Conference CAS 2017 (pp.29-36). Bucarest : IEEE [10.1109/SMICND.2017.8101147].
Near-field microwave techniques for micro – and nano - scale characterization in materials science
LUCIBELLO, ANDREA;CHRISTOPHER, HARDLY JOSEPH;BARTOLUCCI, GIANCARLO;
2017-12-01
Abstract
In this paper, the basic principles of Near-Field Microscopy will be reviewed with focus on the micro- and nano-scale resolution configurations for material science measurements. Results on doping profile, dielectric and magnetic properties will be presented, with details on the calibration protocols needed for quantitative estimation of the dielectric constant and of the permeability.| File | Dimensione | Formato | |
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