In this paper, the basic principles of Near-Field Microscopy will be reviewed with focus on the micro- and nano-scale resolution configurations for material science measurements. Results on doping profile, dielectric and magnetic properties will be presented, with details on the calibration protocols needed for quantitative estimation of the dielectric constant and of the permeability.

Marcelli, R., Lucibello, A., Capoccia, G., Proietti, E., Sardi, G., Christopher, H.j., et al. (2017). Near-field microwave techniques for micro – and nano - scale characterization in materials science. In Proceedings of International Semiconductor Conference CAS 2017 (pp.29-36). Bucarest : IEEE [10.1109/SMICND.2017.8101147].

Near-field microwave techniques for micro – and nano - scale characterization in materials science

LUCIBELLO, ANDREA;CHRISTOPHER, HARDLY JOSEPH;BARTOLUCCI, GIANCARLO;
2017-12

Abstract

In this paper, the basic principles of Near-Field Microscopy will be reviewed with focus on the micro- and nano-scale resolution configurations for material science measurements. Results on doping profile, dielectric and magnetic properties will be presented, with details on the calibration protocols needed for quantitative estimation of the dielectric constant and of the permeability.
International Semiconductor Conference CAS 2017
Sinaia
2017
40
National Institute for R&D in Microtechnology (IMT Bucharest)
Rilevanza internazionale
contributo
ott-2017
Settore ING-INF/01 - Elettronica
English
Near-Field; Microwave Microscopy; Materials Science; Dielectric Materials; Magnetism
Intervento a convegno
Marcelli, R., Lucibello, A., Capoccia, G., Proietti, E., Sardi, G., Christopher, H.j., et al. (2017). Near-field microwave techniques for micro – and nano - scale characterization in materials science. In Proceedings of International Semiconductor Conference CAS 2017 (pp.29-36). Bucarest : IEEE [10.1109/SMICND.2017.8101147].
R., M; Lucibello, A; G., C; E., P; G., S; Christopher, Hj; L., M; Bartolucci, G; F., K; G., G; M., K
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/2108/195579
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