In this work we present a novel technology for tailoring the edges of a polymer sacrificial layer by combining multiple techniques. Standard polymers like Shipley Microposit S1818 for the sacrificial layers and gold as a structural layer have been used for our purposes. As a result, oblique profiles of double clamped bridges have been obtained, characterized by an improved homogeneity of the deposited metal thickness on the edges and by a very good surface planarity.

Lucibello, A., Proietti, E., Marcelli, R., Bartolucci, G. (2012). Smoothing and surface planarization of sacrificial layers in MEMS technology. In DTIP 2012 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (pp.22-26). IEEE.

Smoothing and surface planarization of sacrificial layers in MEMS technology

BARTOLUCCI, GIANCARLO
2012-04-01

Abstract

In this work we present a novel technology for tailoring the edges of a polymer sacrificial layer by combining multiple techniques. Standard polymers like Shipley Microposit S1818 for the sacrificial layers and gold as a structural layer have been used for our purposes. As a result, oblique profiles of double clamped bridges have been obtained, characterized by an improved homogeneity of the deposited metal thickness on the edges and by a very good surface planarity.
2012 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2012
Cannes
2012
Rilevanza internazionale
contributo
apr-2012
apr-2012
Settore ING-INF/01 - ELETTRONICA
English
Planarization; RF MEMS; Sacrificial Layer; Smoothing
Intervento a convegno
Lucibello, A., Proietti, E., Marcelli, R., Bartolucci, G. (2012). Smoothing and surface planarization of sacrificial layers in MEMS technology. In DTIP 2012 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (pp.22-26). IEEE.
Lucibello, A; Proietti, E; Marcelli, R; Bartolucci, G
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/2108/183613
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