In this work we present a novel technology for tailoring the edges of a polymer sacrificial layer by combining multiple techniques. Standard polymers like Shipley Microposit S1818 for the sacrificial layers and gold as a structural layer have been used for our purposes. As a result, oblique profiles of double clamped bridges have been obtained, characterized by an improved homogeneity of the deposited metal thickness on the edges and by a very good surface planarity.
Lucibello, A., Proietti, E., Marcelli, R., Bartolucci, G. (2012). Smoothing and surface planarization of sacrificial layers in MEMS technology. In DTIP 2012 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (pp.22-26). IEEE.
Smoothing and surface planarization of sacrificial layers in MEMS technology
BARTOLUCCI, GIANCARLO
2012-04-01
Abstract
In this work we present a novel technology for tailoring the edges of a polymer sacrificial layer by combining multiple techniques. Standard polymers like Shipley Microposit S1818 for the sacrificial layers and gold as a structural layer have been used for our purposes. As a result, oblique profiles of double clamped bridges have been obtained, characterized by an improved homogeneity of the deposited metal thickness on the edges and by a very good surface planarity.| File | Dimensione | Formato | |
|---|---|---|---|
|
DTIP_2012.pdf
solo utenti autorizzati
Licenza:
Copyright dell'editore
Dimensione
450.59 kB
Formato
Adobe PDF
|
450.59 kB | Adobe PDF | Visualizza/Apri Richiedi una copia |
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
