This paper presents the design of distributed MEMS phase shifters by means of the image-parameters method. The proposed analytic approach utilizes a more precise modeling of the MEMS device with respect to that one usually adopted in literature. The most important analytic aspects concerning the synthesis technique are presented. As a demonstration of the method a structure characterized by a differential phase shift value of 90° is designed and simulated, exhibiting very good electric performance.
Lucibello, A., Proietti, E., Marcelli, R., Bartolucci, G., De Angelis, G. (2014). Analytic design method for distributed RF MEMS phase shifters. In 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2014 (pp.1-3). IEEE [10.1109/DTIP.2014.7056678].
Analytic design method for distributed RF MEMS phase shifters
BARTOLUCCI, GIANCARLO;
2014-01-01
Abstract
This paper presents the design of distributed MEMS phase shifters by means of the image-parameters method. The proposed analytic approach utilizes a more precise modeling of the MEMS device with respect to that one usually adopted in literature. The most important analytic aspects concerning the synthesis technique are presented. As a demonstration of the method a structure characterized by a differential phase shift value of 90° is designed and simulated, exhibiting very good electric performance.| File | Dimensione | Formato | |
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