Coplanar wave-guide grounded lines (CPWG) have been de- signed, realized by micro-machining of high resistivity silicon wafers and tested up to 40 GHz. Different configurations have been compared between them by changing the dimensions of the micro-machined via-holes used for the ground connection, as well as their number and separation, to get the optimal electrical matching conditions. Wide-band matching and losses as low as 0.1{0.2 dB/mm have been obtained within the 40 GHz range, in agreement with the predicted behavior.

Lucibello, A., De Angelis, G., Proietti, E., Marcelli, R., Bartolucci, G. (2009). Design, technology and test of micro-machined coplanar grounded wave-guides on si substrates. ROMANIAN JOURNAL OF INFORMATION SCIENCE AND TECHNOLOGY, 12(3), 366-375.

Design, technology and test of micro-machined coplanar grounded wave-guides on si substrates

BARTOLUCCI, GIANCARLO
2009-01-01

Abstract

Coplanar wave-guide grounded lines (CPWG) have been de- signed, realized by micro-machining of high resistivity silicon wafers and tested up to 40 GHz. Different configurations have been compared between them by changing the dimensions of the micro-machined via-holes used for the ground connection, as well as their number and separation, to get the optimal electrical matching conditions. Wide-band matching and losses as low as 0.1{0.2 dB/mm have been obtained within the 40 GHz range, in agreement with the predicted behavior.
2009
Pubblicato
Rilevanza internazionale
Articolo
Esperti anonimi
Settore ING-INF/01 - ELETTRONICA
English
Con Impact Factor ISI
Micromachining; RF MEMS
Lucibello, A., De Angelis, G., Proietti, E., Marcelli, R., Bartolucci, G. (2009). Design, technology and test of micro-machined coplanar grounded wave-guides on si substrates. ROMANIAN JOURNAL OF INFORMATION SCIENCE AND TECHNOLOGY, 12(3), 366-375.
Lucibello, A; De Angelis, G; Proietti, E; Marcelli, R; Bartolucci, G
Articolo su rivista
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/2108/96567
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 1
  • ???jsp.display-item.citation.isi??? ND
social impact