In this work we present a novel technology for tailoring the edges of a polymer sacrificial layer by combining multiple techniques. Standard polymers like Shipley Microposit S1818 for the sacrificial layers and gold as a structural layer have been used for our purposes. As a result, oblique profiles of double clamped bridges have been obtained, characterized by an improved homogeneity of the deposited metal thickness on the edges and by a very good surface planarity.
Lucibello, A., Proietti, E., Marcelli, R., Bartolucci, G. (2013). Smoothing and surface planarization of sacrificial layers in MEMS technology. MICROSYSTEM TECHNOLOGIES, 19(6), 845-851 [10.1007/s00542-013-1747-6].
Smoothing and surface planarization of sacrificial layers in MEMS technology
BARTOLUCCI, GIANCARLO
2013-06-01
Abstract
In this work we present a novel technology for tailoring the edges of a polymer sacrificial layer by combining multiple techniques. Standard polymers like Shipley Microposit S1818 for the sacrificial layers and gold as a structural layer have been used for our purposes. As a result, oblique profiles of double clamped bridges have been obtained, characterized by an improved homogeneity of the deposited metal thickness on the edges and by a very good surface planarity.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
