Deposits of individual diamond grains and continuous polycrystalline diamond layers have been generated by means of a HFCVD technique onto different types of untreated or seeded NbN surfaces. To test the feasibility of using diamond layers as protective coatings for aerospace applications, we carried out diamond deposition onto the lithographically defined NbN microelectrodes of a NbN/SiO2 multifinger device. The morphological and structural features of the diamond deposits and of the substrates were characterized by FE-SEM, XRD and Raman spectroscopy. The preferential growth of diamond on the superconductive NbN enables the selective coating of the NbN microstripes sputtered on the insulating SiO2. Moreover the diamond coating procedure is able to preserve the structural integrity of the substrate material and to retain the shaped architecture of the device. For the polycrystalline diamond layers grown on NbN a residual stress of −9.8 GPa, largely due to thermal stress, has been estimated by Raman analysis. The diamond coatings of the NbN-based architectures result to be mechanically stable.

Orlanducci, S., Guglielmotti, V., Cianchetta, I., Lucci, M., Toschi, F., Tamburri, E., et al. (2011). Diamond layers grown by CVD on NbN systems and NbN/SiO2 devices. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 11(9), 8185-8189 [doi:10.1166/jnn.2011.5095].

Diamond layers grown by CVD on NbN systems and NbN/SiO2 devices

ORLANDUCCI, SILVIA;Guglielmotti, V.;LUCCI, MASSIMILIANO;TAMBURRI, EMANUELA;TERRANOVA PERSICHELLI, MARIA LETIZIA
2011-01-01

Abstract

Deposits of individual diamond grains and continuous polycrystalline diamond layers have been generated by means of a HFCVD technique onto different types of untreated or seeded NbN surfaces. To test the feasibility of using diamond layers as protective coatings for aerospace applications, we carried out diamond deposition onto the lithographically defined NbN microelectrodes of a NbN/SiO2 multifinger device. The morphological and structural features of the diamond deposits and of the substrates were characterized by FE-SEM, XRD and Raman spectroscopy. The preferential growth of diamond on the superconductive NbN enables the selective coating of the NbN microstripes sputtered on the insulating SiO2. Moreover the diamond coating procedure is able to preserve the structural integrity of the substrate material and to retain the shaped architecture of the device. For the polycrystalline diamond layers grown on NbN a residual stress of −9.8 GPa, largely due to thermal stress, has been estimated by Raman analysis. The diamond coatings of the NbN-based architectures result to be mechanically stable.
2011
Pubblicato
Rilevanza internazionale
Articolo
Esperti anonimi
Settore CHIM/03 - CHIMICA GENERALE E INORGANICA
English
Con Impact Factor ISI
CVD diamond; NbN; patterned substrate
https://www.ingentaconnect.com/content/asp/jnn/2011/00000011/00000009/art00097
Orlanducci, S., Guglielmotti, V., Cianchetta, I., Lucci, M., Toschi, F., Tamburri, E., et al. (2011). Diamond layers grown by CVD on NbN systems and NbN/SiO2 devices. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 11(9), 8185-8189 [doi:10.1166/jnn.2011.5095].
Orlanducci, S; Guglielmotti, V; Cianchetta, I; Lucci, M; Toschi, F; Tamburri, E; TERRANOVA PERSICHELLI, Ml
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/2108/94995
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