Hybrid Cnanotubes/Si 3D nanostructures by one-step growth in a dual-plasma reactor

Hybrid nanostructures consisting of Si polycrystalline nanocones, with an anemone-like termination coated with C-nanotubes bundles, have been generated on a (1 0 0) Si substrate in a dual mode microwave/radio-frequency plasma reactor. The substrate is both heated and bombarded by energetic H ions during the synthesis process. The nanocones growth is explained considering pull of the growing Si nanocrystalline phase along the lines of the electrical field, likely via a molten/recrystallization mechanism. The one-step building of the achieved complex 3D architectures is described in terms of dynamic competition between Si and C nanotubes growth under the peculiar conditions of kinetically driven processes.