Preparation of submicron (NbV)N superconducting thin film strip particle detectors

Superconducting thin film particle detectors can be specially attractive for minimum ionizing particle detection due to the high efficiency and low sensitivity to radiation damage. In this paper we describe the fabrication procedure and the characterization of (NbV)N films and the set-up of photolithography processes to realize well defined submicron lines on these films in order to produce and test, in the near future, full operating detectors based on such material. © 1992.