Superconducting thin film particle detectors can be specially attractive for minimum ionizing particle detection due to the high efficiency and low sensitivity to radiation damage. In this paper we describe the fabrication procedure and the characterization of (NbV)N films and the set-up of photolithography processes to realize well defined submicron lines on these films in order to produce and test, in the near future, full operating detectors based on such material. © 1992.

Luzzi, G., Nigro, A., Vaglio, R., Cirillo, M., Gentili, M., Luciani, L. (1992). Preparation of submicron (NbV)N superconducting thin film strip particle detectors. MICROELECTRONIC ENGINEERING, 17(2009/04/01 00:00:00.000), 547-550.

Preparation of submicron (NbV)N superconducting thin film strip particle detectors

CIRILLO, MATTEO;
1992-01-01

Abstract

Superconducting thin film particle detectors can be specially attractive for minimum ionizing particle detection due to the high efficiency and low sensitivity to radiation damage. In this paper we describe the fabrication procedure and the characterization of (NbV)N films and the set-up of photolithography processes to realize well defined submicron lines on these films in order to produce and test, in the near future, full operating detectors based on such material. © 1992.
Pubblicato
Rilevanza internazionale
Articolo
Sì, ma tipo non specificato
Settore FIS/03 - Fisica della Materia
English
Lithography - Photolithography; Semiconductor Devices - Fabrication; Superconducting Films - Characterization; Superconducting Films - Thin Films; Submicron Particle Detectors; Superconducting Thin Film Strip; Particle Detectors
Luzzi, G., Nigro, A., Vaglio, R., Cirillo, M., Gentili, M., Luciani, L. (1992). Preparation of submicron (NbV)N superconducting thin film strip particle detectors. MICROELECTRONIC ENGINEERING, 17(2009/04/01 00:00:00.000), 547-550.
Luzzi, G; Nigro, A; Vaglio, R; Cirillo, M; Gentili, M; Luciani, L
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/2108/55529
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