Hydrogenated amorphous silicon carbon films, with relatively low hydrogen content and carbon fraction x, C/(C + Si), ranging from 0.20 to 0.57 have been deposited by RF-plasma enhanced chemical vapor deposition (PECVD) for excimer laser annealing experiments. After the laser treatments all the films show structural modifications. It has been obtained that with increasing, x the crystallinity degree of the Si phase decreases, while that of the SiC phase increases and becomes predominant for x = 0.39. In the overstoichiometric samples only the c-SiC phase has been observed. In all the treated samples 3C-SiC crystallites have been detected. (c) 2005 Elsevier B.V. All rights reserved.

Coscia, U., Ambrosone, G., Minarini, C., Parisi, V., Schutzmann, S., Tebano, A. (2006). Structural modification of laser annealed a-Si1-xCx:H films. APPLIED SURFACE SCIENCE, 252(13 SPEC. ISS.), 4493-4496 [10.1016/j.apsusc.2005.07.130].

Structural modification of laser annealed a-Si1-xCx:H films

TEBANO, ANTONELLO
2006-01-01

Abstract

Hydrogenated amorphous silicon carbon films, with relatively low hydrogen content and carbon fraction x, C/(C + Si), ranging from 0.20 to 0.57 have been deposited by RF-plasma enhanced chemical vapor deposition (PECVD) for excimer laser annealing experiments. After the laser treatments all the films show structural modifications. It has been obtained that with increasing, x the crystallinity degree of the Si phase decreases, while that of the SiC phase increases and becomes predominant for x = 0.39. In the overstoichiometric samples only the c-SiC phase has been observed. In all the treated samples 3C-SiC crystallites have been detected. (c) 2005 Elsevier B.V. All rights reserved.
Pubblicato
Rilevanza internazionale
Articolo
Sì, ma tipo non specificato
Settore FIS/03 - Fisica della Materia
English
Crystallization; Pulsed laser treatment; Silicon-carbon alloys
Coscia, U., Ambrosone, G., Minarini, C., Parisi, V., Schutzmann, S., Tebano, A. (2006). Structural modification of laser annealed a-Si1-xCx:H films. APPLIED SURFACE SCIENCE, 252(13 SPEC. ISS.), 4493-4496 [10.1016/j.apsusc.2005.07.130].
Coscia, U; Ambrosone, G; Minarini, C; Parisi, V; Schutzmann, S; Tebano, A
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/2108/52398
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