The mechanical behaviour of the film and the thickness influence on the surface morphology have been studied in detail for Ti-sputtered coatings deposited at room temperature on AA6082 T6 and AA2618/20% Al2O3 flat samples. The intrinsic hardness and surface roughness of Ti thin films ranging from 0.5 μm to 2 μm have been investigated. The higher the coating thickness (up to 2 μm), the lower the surface roughness and the higher the intrinsic hardness of the film. The improvement of surface roughness has been achieved by Ti-sputtered clusters able to cover the micro-valleys.
Costanza, G., Mercuri, F., Tata, M.e. (2008). Mechanical and surface properties of Ti sputtered thin films. INTERNATIONAL JOURNAL OF SURFACE SCIENCE AND ENGINEERING, 2(5), 366-375 [10.1504/IJSURFSE.2008.021348].
Mechanical and surface properties of Ti sputtered thin films
COSTANZA, GIROLAMO;MERCURI, FULVIO;TATA, MARIA ELISA
2008-01-01
Abstract
The mechanical behaviour of the film and the thickness influence on the surface morphology have been studied in detail for Ti-sputtered coatings deposited at room temperature on AA6082 T6 and AA2618/20% Al2O3 flat samples. The intrinsic hardness and surface roughness of Ti thin films ranging from 0.5 μm to 2 μm have been investigated. The higher the coating thickness (up to 2 μm), the lower the surface roughness and the higher the intrinsic hardness of the film. The improvement of surface roughness has been achieved by Ti-sputtered clusters able to cover the micro-valleys.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
