On the basis of an analysis of experimental data on nucleation rates performed in the preceding paper in this issue, patterns of the process of diamond nucleation from the gas phase on Si(100) substrates have been drawn. A kinetic scheme is proposed which is apparently able to describe the complex behavior of the system in the temperature range 750 K-1225 K, at (CH4/H2) ratios between 0.5 and 2% and at a total pressure of 100 mbar. The model postulates a distribution function of the nucleation centers over the heats of adsorption of active gaseous species and introduces a cut-off criterion based on the necessary condition that adjacent active sites coexist for times longer than the characteristic time of germ growth. Nucleation centers, active sites, germs, and nuclei have been defined by simple molecular models and their rates of transformation discussed, using available literature data.

Molinari, E., Polini, R., & Tomellini, M. (1993). Patterns of diamond nucleation from the gas phase. JOURNAL OF MATERIALS RESEARCH, 8(4), 798-810 [10.1557/JMR.1993.0798].

Patterns of diamond nucleation from the gas phase

MOLINARI, ETTORE;POLINI, RICCARDO;TOMELLINI, MASSIMO
1993

Abstract

On the basis of an analysis of experimental data on nucleation rates performed in the preceding paper in this issue, patterns of the process of diamond nucleation from the gas phase on Si(100) substrates have been drawn. A kinetic scheme is proposed which is apparently able to describe the complex behavior of the system in the temperature range 750 K-1225 K, at (CH4/H2) ratios between 0.5 and 2% and at a total pressure of 100 mbar. The model postulates a distribution function of the nucleation centers over the heats of adsorption of active gaseous species and introduces a cut-off criterion based on the necessary condition that adjacent active sites coexist for times longer than the characteristic time of germ growth. Nucleation centers, active sites, germs, and nuclei have been defined by simple molecular models and their rates of transformation discussed, using available literature data.
Pubblicato
Rilevanza internazionale
Articolo
Sì, ma tipo non specificato
Settore CHIM/03 - Chimica Generale e Inorganica
Settore FIS/03 - Fisica della Materia
English
Con Impact Factor ISI
Diamond; Nucleation; Silicon; Kinetics; Chemical vapor deposition; Crystal growth; Mathematical models
Molinari, E., Polini, R., & Tomellini, M. (1993). Patterns of diamond nucleation from the gas phase. JOURNAL OF MATERIALS RESEARCH, 8(4), 798-810 [10.1557/JMR.1993.0798].
Molinari, E; Polini, R; Tomellini, M
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/2108/44658
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