Particle size distributions derived from SEM micrographs of well-separated diamond particles, deposited on Si(100) substrates by the hot filament CVD method, have been analyzed in connection with previous measurements of particle growth rates. Rates of nucleation have been obtained from this analysis in an extended range of deposition conditions. A previously developed nucleation model has been utilized, and the kinetic parameters provide a framework for modeling the nucleation process from the gas phase.
Molinari, E., Polini, R., Sessa, V., TERRANOVA PERSICHELLI, M.l., Tomellini, M. (1993). Diamond nucleation from the gas phase: a kinetic approach. JOURNAL OF MATERIALS RESEARCH, 8(4), 785-797 [10.1557/JMR.1993.0785].
Diamond nucleation from the gas phase: a kinetic approach
MOLINARI, ETTORE;POLINI, RICCARDO;SESSA, VITO;TERRANOVA PERSICHELLI, MARIA LETIZIA;TOMELLINI, MASSIMO
1993-01-01
Abstract
Particle size distributions derived from SEM micrographs of well-separated diamond particles, deposited on Si(100) substrates by the hot filament CVD method, have been analyzed in connection with previous measurements of particle growth rates. Rates of nucleation have been obtained from this analysis in an extended range of deposition conditions. A previously developed nucleation model has been utilized, and the kinetic parameters provide a framework for modeling the nucleation process from the gas phase.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
