Particle size distributions derived from SEM micrographs of well-separated diamond particles, deposited on Si(100) substrates by the hot filament CVD method, have been analyzed in connection with previous measurements of particle growth rates. Rates of nucleation have been obtained from this analysis in an extended range of deposition conditions. A previously developed nucleation model has been utilized, and the kinetic parameters provide a framework for modeling the nucleation process from the gas phase.

Molinari, E., Polini, R., Sessa, V., Terranova, M.L., & Tomellini, M. (1993). Diamond nucleation from the gas phase: a kinetic approach. JOURNAL OF MATERIALS RESEARCH, 8(4), 785-797 [10.1557/JMR.1993.0785].

Diamond nucleation from the gas phase: a kinetic approach

MOLINARI, ETTORE;POLINI, RICCARDO;SESSA, VITO;TERRANOVA PERSICHELLI, MARIA LETIZIA;TOMELLINI, MASSIMO
1993

Abstract

Particle size distributions derived from SEM micrographs of well-separated diamond particles, deposited on Si(100) substrates by the hot filament CVD method, have been analyzed in connection with previous measurements of particle growth rates. Rates of nucleation have been obtained from this analysis in an extended range of deposition conditions. A previously developed nucleation model has been utilized, and the kinetic parameters provide a framework for modeling the nucleation process from the gas phase.
Pubblicato
Rilevanza internazionale
Articolo
Sì, ma tipo non specificato
Settore CHIM/03 - Chimica Generale e Inorganica
Settore ING-IND/22 - Scienza e Tecnologia dei Materiali
English
Con Impact Factor ISI
Diamond; Chemical vapor deposition; Crystal growth; Particle size analysis; Scanning electron microscopy; Semiconducting silicon; Substrates; nucleation
Molinari, E., Polini, R., Sessa, V., Terranova, M.L., & Tomellini, M. (1993). Diamond nucleation from the gas phase: a kinetic approach. JOURNAL OF MATERIALS RESEARCH, 8(4), 785-797 [10.1557/JMR.1993.0785].
Molinari, E; Polini, R; Sessa, V; TERRANOVA PERSICHELLI, Ml; Tomellini, M
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/2108/44621
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