We reported the design and realization of a carbon nanotube-based integrated multielectrode device. Patterned Si/SiO2/Nb/Nb2O5 multilayer was successfully realized by means of a few, common photolithographic processes with the minimum number of mask alignment steps. Such structure constitutes the patterned substrate of successive Hot Filament Chemical Vapour Deposition (HFCVD) process. Selective growth of highly oriented SWCNT arrays was obtained in the predefined locations while survival of the entire structure was achieved. Field emission measurements of such materials were carried out. Good and reproducible field emission behaviour has been observed in several realized structures.
Brunetti, F., DI CARLO, A., Riccitelli, R., Reale, A., Regoliosi, P., Lucci, M., et al. (2005). Towards the realization of multielectrode field emission devices : controlled growth of single walled carbon nanotube arrays. In L.K. P.Lugli (a cura di), Nanotechnology II (pp. 154-161). Bellingham : SPIE [10.1117/12.609382].
Towards the realization of multielectrode field emission devices : controlled growth of single walled carbon nanotube arrays
BRUNETTI, FRANCESCA;DI CARLO, ALDO;REALE, ANDREA;LUCCI, MASSIMILIANO;TERRANOVA PERSICHELLI, MARIA LETIZIA;ORLANDUCCI, SILVIA;SESSA, VITO;CIRILLO, MATTEO;MERLO, VITTORIO
2005-01-01
Abstract
We reported the design and realization of a carbon nanotube-based integrated multielectrode device. Patterned Si/SiO2/Nb/Nb2O5 multilayer was successfully realized by means of a few, common photolithographic processes with the minimum number of mask alignment steps. Such structure constitutes the patterned substrate of successive Hot Filament Chemical Vapour Deposition (HFCVD) process. Selective growth of highly oriented SWCNT arrays was obtained in the predefined locations while survival of the entire structure was achieved. Field emission measurements of such materials were carried out. Good and reproducible field emission behaviour has been observed in several realized structures.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
