SnO2 thin films have been grown by radio frequency reactive sputtering method in order to be used as a gas sensor. Subsequently Pt has been added to the SnO2 films to increase the sensitivity to carbon monoxide gas. Two different substrates have been used: rough and mechanically polished alumina. The morphology of the film has been characterized by atomic force microscopy, whereas the chemical composition was analyzed by x-ray photoemission spectromicroscopy. Pt:SnO2 clusters with widths of 500-600 nm were observed on the rough alumina, whereas on the mechanically polished alumina, the Pt:SnO2 film was smoother. X-ray photoemission spectromicroscopy measurements show for Pt:SnO2 films on rough alumina substrates different charging in different areas of the sample. The response curve to carbon monoxide is 30% higher for rough alumina.
Cricenti, A., Generosi, R., Scarselli, M., Perfetti, P., Siciliano, P., Serra, A., et al. (1996). Pt:SnO2 thin films for gas sensor characterized by atomic force microscopy and x-ray photoemission spectromicroscopy. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY. B, 14(2), 1527-1530 [10.1116/1.589132].
Pt:SnO2 thin films for gas sensor characterized by atomic force microscopy and x-ray photoemission spectromicroscopy
Scarselli, MA;
1996-01-01
Abstract
SnO2 thin films have been grown by radio frequency reactive sputtering method in order to be used as a gas sensor. Subsequently Pt has been added to the SnO2 films to increase the sensitivity to carbon monoxide gas. Two different substrates have been used: rough and mechanically polished alumina. The morphology of the film has been characterized by atomic force microscopy, whereas the chemical composition was analyzed by x-ray photoemission spectromicroscopy. Pt:SnO2 clusters with widths of 500-600 nm were observed on the rough alumina, whereas on the mechanically polished alumina, the Pt:SnO2 film was smoother. X-ray photoemission spectromicroscopy measurements show for Pt:SnO2 films on rough alumina substrates different charging in different areas of the sample. The response curve to carbon monoxide is 30% higher for rough alumina.| File | Dimensione | Formato | |
|---|---|---|---|
|
JVSTB-Cricenti(1996)PtSnO2 thin films for gas sensor characterized with AFM.pdf
solo utenti autorizzati
Descrizione: articolo pubblicato
Tipologia:
Versione Editoriale (PDF)
Licenza:
Copyright dell'editore
Dimensione
427.47 kB
Formato
Adobe PDF
|
427.47 kB | Adobe PDF | Visualizza/Apri Richiedi una copia |
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
