In this paper, a circuit model to predict the microwave response of a shunt-connected capacitive microelectromechanical coplanar switch is proposed. The numerical values of the lumped elements composing the equivalent circuit are computed by means of a fully analytic approach. In particular, the contribution of resistive and inductive parasitic elements has been evaluated by using closed-form expressions. Configurations characterized by different technological solutions have been obtained and modeled. Simulations performed with the proposed approach correlate very well with actual measurements.
Bartolucci, G., Marcelli, R., Catoni, S., Giacomozzi, F., Margesin, B., Mulloni, V., et al. (2008). An equivalent-circuit model for shunt-connected coplanar microelectromechanical-system switches for high frequency applications. JOURNAL OF APPLIED PHYSICS, 104, 845141-845148 [10.1063/1.3003568].
An equivalent-circuit model for shunt-connected coplanar microelectromechanical-system switches for high frequency applications
BARTOLUCCI, GIANCARLO;
2008-10-01
Abstract
In this paper, a circuit model to predict the microwave response of a shunt-connected capacitive microelectromechanical coplanar switch is proposed. The numerical values of the lumped elements composing the equivalent circuit are computed by means of a fully analytic approach. In particular, the contribution of resistive and inductive parasitic elements has been evaluated by using closed-form expressions. Configurations characterized by different technological solutions have been obtained and modeled. Simulations performed with the proposed approach correlate very well with actual measurements.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
