Zirconium titanate-based thin films are considered as a promising dielectric material for the next generation of integrated microwave devices. The zirconium tin titanate (ZTS) precursor was prepared via a polymeric precursor process in aqueous phase. based on the citrate route. The presented chemical procedure is original for this kind of materials. C-13 nuclear magnetic resonance (NMR) spectra showed that stable mixed-metal chelate complex has been formed. The viscous resin was multiple spin-coated with intermediate firings at 300 degreesC onto platinized Si substrates and fired in air at 700 degreesC. Thin films 200-nm thick were obtained. Atomic force microscope (AFM) analysis showed that the coverage is homogeneous, the surface texture consisting of elongated grains of average size 20 X 36 nm. Grazing incidence X-ray diffraction analysis (GIXRD) indicated that only the zirconium tin titanate phase is present within the examined range of penetration depth. (C) 2001 Elsevier Science BN. AA rights reserved.

Bianco, A., Viticoli, M., Gusmano, G., Paci, M., Padeletti, G., Scardi, P. (2001). Zirconium tin titanate thin films via aqueous polymeric precursor route. MATERIALS SCIENCE AND ENGINEERING. C, BIOMIMETIC MATERIALS, SENSORS AND SYSTEMS, 15(2), 211-213 [10.1016/S0928-4931(01)00218-1].

Zirconium tin titanate thin films via aqueous polymeric precursor route

BIANCO, ALESSANDRA;GUSMANO, GUALTIERO;PACI, MAURIZIO;
2001-01-01

Abstract

Zirconium titanate-based thin films are considered as a promising dielectric material for the next generation of integrated microwave devices. The zirconium tin titanate (ZTS) precursor was prepared via a polymeric precursor process in aqueous phase. based on the citrate route. The presented chemical procedure is original for this kind of materials. C-13 nuclear magnetic resonance (NMR) spectra showed that stable mixed-metal chelate complex has been formed. The viscous resin was multiple spin-coated with intermediate firings at 300 degreesC onto platinized Si substrates and fired in air at 700 degreesC. Thin films 200-nm thick were obtained. Atomic force microscope (AFM) analysis showed that the coverage is homogeneous, the surface texture consisting of elongated grains of average size 20 X 36 nm. Grazing incidence X-ray diffraction analysis (GIXRD) indicated that only the zirconium tin titanate phase is present within the examined range of penetration depth. (C) 2001 Elsevier Science BN. AA rights reserved.
Pubblicato
Rilevanza internazionale
Articolo
Sì, ma tipo non specificato
Settore ING-IND/22 - Scienza e Tecnologia dei Materiali
English
Con Impact Factor ISI
Dielectric; Thin film; Zirconium tin tinate
Bianco, A., Viticoli, M., Gusmano, G., Paci, M., Padeletti, G., Scardi, P. (2001). Zirconium tin titanate thin films via aqueous polymeric precursor route. MATERIALS SCIENCE AND ENGINEERING. C, BIOMIMETIC MATERIALS, SENSORS AND SYSTEMS, 15(2), 211-213 [10.1016/S0928-4931(01)00218-1].
Bianco, A; Viticoli, M; Gusmano, G; Paci, M; Padeletti, G; Scardi, P
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/2108/25485
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