Optoelectronic properties of CVD-diamond thin films grown on silicon have been investigated in order to study the applications of diamond as active material for UV and soft X-ray photodetectors. A comparison of electrical and photoelectrical properties between diamond films grown by hot filament and microwave plasma enhanced CVD techniques is reported, discussing the role of the film morphology and the device geometry.

Pace, E., Galluzzi, F., Rossi, M.c., Salvatori, S., Marinelli, M., Paroli, P. (1997). Electro-optical properties of diamond thin films as UV photodetectors. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION A, ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPMENT, 387(1-2), 255-258 [10.1016/S0168-9002(96)01001-7].

Electro-optical properties of diamond thin films as UV photodetectors

Marinelli M.;
1997-01-01

Abstract

Optoelectronic properties of CVD-diamond thin films grown on silicon have been investigated in order to study the applications of diamond as active material for UV and soft X-ray photodetectors. A comparison of electrical and photoelectrical properties between diamond films grown by hot filament and microwave plasma enhanced CVD techniques is reported, discussing the role of the film morphology and the device geometry.
1997
Pubblicato
Rilevanza internazionale
Articolo
Esperti anonimi
Settore FIS/01 - FISICA SPERIMENTALE
English
CVD-diamond; UV photodetector
Pace, E., Galluzzi, F., Rossi, M.c., Salvatori, S., Marinelli, M., Paroli, P. (1997). Electro-optical properties of diamond thin films as UV photodetectors. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION A, ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPMENT, 387(1-2), 255-258 [10.1016/S0168-9002(96)01001-7].
Pace, E; Galluzzi, F; Rossi, Mc; Salvatori, S; Marinelli, M; Paroli, P
Articolo su rivista
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/2108/247738
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