Diamond-like carbon (DLC) films were deposited using two different types of high current arc evaporation. The first process used a magnetic particle filter to remove droplets from the plasma. For the second process, the samples were put into a metallic cage which was placed directly above the plasma source. For both processes, we varied the substrate temperature from 21 to 350 degrees C in order to investigate the temperature effect. The samples were characterized using SEM, AFM, XPS, Raman Spectroscopy, Ellipsometry, Photometry, and Nano Indentation in order to compare both methods of deposition and provide a careful characterization of such DLC films. We found that the sp(3) content and the hardness can be precisely adjusted by changing the substrate temperature. Furthermore, in the case of unfiltered deposition, the optical constants can be shifted in the direction of higher absorbance in order to produce black and hard carbon coatings.

Lux, H., Edling, M., Lucci, M., Kitzmann, J., Villringer, C., Siemroth, P., et al. (2019). The role of substrate temperature and magnetic filtering for DLC by cathodic arc evaporation. COATINGS, 9(5), 345 [10.3390/COATINGS9050345].

The role of substrate temperature and magnetic filtering for DLC by cathodic arc evaporation

Lucci M.
Membro del Collaboration Group
;
Villringer C.
Membro del Collaboration Group
;
De Matteis F.
Membro del Collaboration Group
;
2019-01-01

Abstract

Diamond-like carbon (DLC) films were deposited using two different types of high current arc evaporation. The first process used a magnetic particle filter to remove droplets from the plasma. For the second process, the samples were put into a metallic cage which was placed directly above the plasma source. For both processes, we varied the substrate temperature from 21 to 350 degrees C in order to investigate the temperature effect. The samples were characterized using SEM, AFM, XPS, Raman Spectroscopy, Ellipsometry, Photometry, and Nano Indentation in order to compare both methods of deposition and provide a careful characterization of such DLC films. We found that the sp(3) content and the hardness can be precisely adjusted by changing the substrate temperature. Furthermore, in the case of unfiltered deposition, the optical constants can be shifted in the direction of higher absorbance in order to produce black and hard carbon coatings.
Pubblicato
Rilevanza internazionale
Articolo
Esperti anonimi
Settore FIS/01 - Fisica Sperimentale
Settore FIS/03 - Fisica della Materia
Settore ING-IND/23 - Chimica Fisica Applicata
English
DLC; ta-C; arc evaporation; substrate temperature; hardness; optical constants; Ellipsometry
Lux, H., Edling, M., Lucci, M., Kitzmann, J., Villringer, C., Siemroth, P., et al. (2019). The role of substrate temperature and magnetic filtering for DLC by cathodic arc evaporation. COATINGS, 9(5), 345 [10.3390/COATINGS9050345].
Lux, H; Edling, M; Lucci, M; Kitzmann, J; Villringer, C; Siemroth, P; De Matteis, F; Schrader, S
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/2108/228198
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