A method based on the analysis of both the amplitude and phase of the photothermal deflection spectroscopy signal which enables one to locate surface states on the front or rear surface of semiconductor wafers and to measure their absorption. The procedure also allows the determination of the sample thermal conductivity.
Zammit, U., Gasparrini, F., Marinelli, M., Pizzoferrato, R., Scudieri, F., Martellucci, S. (1991). Surface states studies in semiconductors by photothermal deflection spectroscopy. JOURNAL OF APPLIED PHYSICS, 69(4), 2577-2580 [10.1063/1.348646].
Surface states studies in semiconductors by photothermal deflection spectroscopy
ZAMMIT, UGO;MARINELLI, MASSIMO;PIZZOFERRATO, ROBERTO;SCUDIERI, FOLCO;MARTELLUCCI, SERGIO
1991-01-01
Abstract
A method based on the analysis of both the amplitude and phase of the photothermal deflection spectroscopy signal which enables one to locate surface states on the front or rear surface of semiconductor wafers and to measure their absorption. The procedure also allows the determination of the sample thermal conductivity.File in questo prodotto:
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