Two different topologies of radio frequency micro-electro-mechanical system (RF MEMS) series ohmic switches (cantilever and clamped–clamped beams) in coplanar waveguide (CPW) configuration have been characterized by means of DC, environmental, and RF measurements. In particular, on-wafer checks have been followed by RF test after vibration, thermal shocks, and temperature cycles. The devices have been manufactured on high resistivity silicon substrates, as building blocks to be implemented in different single-pole 4-throw (SP4 T), double-pole double-throw (DPDT) configurations, and then integrated in Low Temperature Co-fired Ceramics (LTCC) technology for the realization of large-order Clos 3D networks.

De Angelis, G., Lucibello, A., Proietti, E., Marcelli, R., Bartolucci, G., Casini, F., et al. (2012). RF MEMS ohmic switches for matrix configurations. INTERNATIONAL JOURNAL OF MICROWAVE AND WIRELESS TECHNOLOGIES, 4(4), 421-433 [http://dx.doi.org/10.1017/S1759078712000074].

RF MEMS ohmic switches for matrix configurations

BARTOLUCCI, GIANCARLO;
2012-08-01

Abstract

Two different topologies of radio frequency micro-electro-mechanical system (RF MEMS) series ohmic switches (cantilever and clamped–clamped beams) in coplanar waveguide (CPW) configuration have been characterized by means of DC, environmental, and RF measurements. In particular, on-wafer checks have been followed by RF test after vibration, thermal shocks, and temperature cycles. The devices have been manufactured on high resistivity silicon substrates, as building blocks to be implemented in different single-pole 4-throw (SP4 T), double-pole double-throw (DPDT) configurations, and then integrated in Low Temperature Co-fired Ceramics (LTCC) technology for the realization of large-order Clos 3D networks.
ago-2012
Pubblicato
Rilevanza internazionale
Articolo
Esperti anonimi
Settore ING-INF/01 - ELETTRONICA
English
Con Impact Factor ISI
Modeling; Simulation and characterizations of devices and circuits; Passive components and circuits; RF-MEMS and MOEMS; Si-based devices and IC technologies
De Angelis, G., Lucibello, A., Proietti, E., Marcelli, R., Bartolucci, G., Casini, F., et al. (2012). RF MEMS ohmic switches for matrix configurations. INTERNATIONAL JOURNAL OF MICROWAVE AND WIRELESS TECHNOLOGIES, 4(4), 421-433 [http://dx.doi.org/10.1017/S1759078712000074].
De Angelis, G; Lucibello, A; Proietti, E; Marcelli, R; Bartolucci, G; Casini, F; Farinelli, P; Mannocchi, G; Di Nardo, S; Pochesci, D; Margesin, B; Giacomozzi, F; Vendier, O; Kim, T; Vietzorreck, L
Articolo su rivista
File in questo prodotto:
File Dimensione Formato  
International Journal of Microwave and Wireless Technologies_2012.doc

accesso aperto

Descrizione: Articolo su rivista internazionale
Dimensione 34.5 kB
Formato Microsoft Word
34.5 kB Microsoft Word Visualizza/Apri

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/2108/104071
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 10
  • ???jsp.display-item.citation.isi??? 9
social impact