We present the results of the application of the dc magnetron sputtering modulation mode to fabricate YBCO homo-biepitaxial thin film Josephson junctions on Yttrium Stabilized Zirconia substrate. A 45° in-plane rotation of the grown YBCO films with respect to the substrate orientation is realized by using a thin YBCO buffer layer deposited at a temperature (∼600 °C) lower than the optimal value (800 °C). The control of the in-plane orientation allows to form Josephson junctions between two YBCO superconducting region of the film with and without buffer layer. We obtained that the modulated deposition mode improves the crystalline in-plane orientation of YBCO on buffer layer/YSZ substrate, increases the grain size and decreases the film stress. The improved homo-epitaxial process was applied for fabrication of dc SQUID devices. © 2006 IOP Publishing Ltd.

Lisitskiy, M., Camerlingo, C., Salvato, M., Vecchione, A., Russo, M. (2006). Improvement of the homo-biepitaxial YBCO film fabrication process on Yttrium Stabilized Zirconia. JOURNAL OF PHYSICS. CONFERENCE SERIES, 43(1), 1135-1138 [10.1088/1742-6596/43/1/276].

Improvement of the homo-biepitaxial YBCO film fabrication process on Yttrium Stabilized Zirconia

SALVATO, MATTEO;
2006-01-01

Abstract

We present the results of the application of the dc magnetron sputtering modulation mode to fabricate YBCO homo-biepitaxial thin film Josephson junctions on Yttrium Stabilized Zirconia substrate. A 45° in-plane rotation of the grown YBCO films with respect to the substrate orientation is realized by using a thin YBCO buffer layer deposited at a temperature (∼600 °C) lower than the optimal value (800 °C). The control of the in-plane orientation allows to form Josephson junctions between two YBCO superconducting region of the film with and without buffer layer. We obtained that the modulated deposition mode improves the crystalline in-plane orientation of YBCO on buffer layer/YSZ substrate, increases the grain size and decreases the film stress. The improved homo-epitaxial process was applied for fabrication of dc SQUID devices. © 2006 IOP Publishing Ltd.
2006
Pubblicato
Rilevanza internazionale
Articolo
Sì, ma tipo non specificato
Settore FIS/03 - FISICA DELLA MATERIA
English
Lisitskiy, M., Camerlingo, C., Salvato, M., Vecchione, A., Russo, M. (2006). Improvement of the homo-biepitaxial YBCO film fabrication process on Yttrium Stabilized Zirconia. JOURNAL OF PHYSICS. CONFERENCE SERIES, 43(1), 1135-1138 [10.1088/1742-6596/43/1/276].
Lisitskiy, M; Camerlingo, C; Salvato, M; Vecchione, A; Russo, M
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/2108/38779
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